Engineering Nanomotor Components from Multi-Walled Carbon Nanotubes via Reactive Ion Etching

نویسندگان

  • T. D. Yuzvinsky
  • A. M. Fennimore
  • A. Zettl
چکیده

It has been shown that a multi-walled carbon nanotube (MWCNT) can be used as the rotation enabling element for nanoelectromechanical systems. Modification of the MWCNT to create a rotational bearing in previous devices has concentrated on smaller diameter tubes and mechanical methods to create the bearing. We here investigate reactive ion etching of a MWCNT as a means to engineer nanomotor components, including the rotational bearing.

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تاریخ انتشار 2004